X-ray analysis apparatus



Dec. 16, 1941. J, c, ULEY 2,432,913

i X-RAY ANALYSIS APPARATUS Fi1ed Dec. 1, 1943 2 sheets-sheet 1 A T TORNEV Patented Dec. 16, 1947 2,432,913 :fr-mr ANALYSIS Arena-AWS;

Jenn e.,

Luiey,.lTeaneck, N. Jr, assgnortofWest-i.

ern Eleetrie'cinpeny,'Inenrporatem New Merk-1t.. N- Y a: eerperation f New/Yeller Amnimaum:memberY 1, 1943,21Serial.Nef 51244515' (Cl. Zller-.831);

which, )the aeryetel ,f Waferl iS. adeSired'f. Tirsrerttis, :n Seretensivee. that e.: completer:dieelesurerthereet; would I be zeeneidered. y,inewriseer f, Furthermeret esthe varie-uasteps merdiffer, tis th 01`1el,itfadv,l vieeble ,tedireet attentien te.. the gee-pending. tele.- nlieeteniei Burton@ Beker, SeriellNe- 491,253 strates..- Seme-:O ...the

filed J une, 17;` 13% which .111v early; Steps. in Athe preeeee- 0i mannfeetureffer loeatlnetheontieaxis whenmeuntinefthefmether: ettme-H Threuehthe aid ofadditienel :meaneee dieelsed` in apbleente-eezperldine applieatierl;-` SerialiNOJrO-G led Oetolfer 19e `1943y0ertai12 et, the other exeei er,V the. mother lSienneheey-Joel leeatedothatthe Sweater example, when meuntedgby the aid. .0f the teaehinee. in. thee-aimeeA mentienedeker application maybe eut inte See` tions 7 of i desired 'Width`s, tij1e cuts extending. at; chosen angles* with respect tovcertain `of Kthe aes Othe Crystal: Subseguentsteps include thecutf.. tine ofthe seetiens, inte, here et., desired.Widthsyu and' the cuttingjof the barsinto given lengths, den pending uponthje -size of, thecrystal plate or Wafer tote Yizr-'ooluced therefrom.\

The materiel'handline aeparetusof. thepreeent disclosureV was designed'forv use atzthisportion of the processfollowing, tigek cutting ofthebars intopredeterrnined lengths, Prior tothe cutting, of-the remaining crystal V'portions into plates for subsequentl reduction toA wafers tinjougi)tireusel of Llappingvv machines, itis necessary tcnlocate l.tine ator-nic-planeV4 inftiiiscrystalportion with respect to ,thephysical `planev orffacc of the crystal struc-V ture;

An objectA-ofetheinvention isto provide asirn-V ,t ple, eicient and rhig'iily--prat-ztica1Xeray analysis apparatus fori examining quartz crystals.

Withthis andy other1` objeetsin View,v Athe invention tcemprises am-nit, for supporting a mate: rial, such as quartz crystal', movableeoifil a table to, a positiontwherefa. pointe in a surface thereof lies` irl-.alignment with `the kaxis ottheytable; means tc- 1o,cate,A thetable withvthe crystal in anyonev 01:'l` aLplurality` of -positions re1ativeto-an- X-ArayU beam, andv mechanism actuableto furtherA move the table with the-unit Within-given limits relative; cl fie,.s aidpositions.`

Qihel fbjectsw,andl advantages` will be appa-rent freni.; the followingdetailedfdescriptiomwhen considered in conjunction with the accornpanyime;drawings .vv-neraln-L Fig. 1-f isa verticallsectionaliviewt of the.ap. paratus, portionstthereof =beingrsho=wn in eier/af.`

tion;

Eig., 211s an.` enlarged.I fragmentary secticnal View` taken along-the. Huele-.2 :of Fig. 1;

lgI 3Lis-anr enlarged fragmentary seetional` view.- taken-along. ythe .Llinet 3er-f3 '.;ofFig, 1

Figli Li is e at longitudinal n sectional 4View of: the work oncrystal support-,takensubstantially along,

the-'line tee-flait-Fis;d 3

Fig., 5f`is an end-elevational Niew of the support t snownin-Figi.V 4,. pnrtionsethereof being broken-` Fig; Seisl a tcpl .plan `View tof sthe. apparatus, and.: Figs.` 7 and ;8:arefschematic,illustrations of dif ferent types oi-crystalfportions from `which crys.-

tal plates aretcbe detained..`

Referring. newL teA thee drawing; attention istA firstdirectetot-Fig. 1; which-.illustrates aetable.. l aupon rwhich'ra baserrl l A, is mounted;Y the latter having r an l. integral tubular" suppcrt. i I 2.-- centrally.,l apertured andi-providedwitnbearingsll 4r Asha-ft l 5e1S` fr0teJtab1yf supported gin; -the .bearings Mirande. is normal 1-y. ,u1reedrevslnwardlytbytarspring .l tcarf riedabrta ee11a1.-.- IT: which is supperted; by.a. nut

dsnosedmpenia t .aded ende lrtoiathe strait.

21| dispersed andahleldtin apdesred-reriiustedrpesif member, eadllutretee Rise, element ziheeeneeerlaediepesedfeeneentr lewer end, O f Wrieh is; meuetedaheed lever- The shaft `26` proj ectscinto, 4 a cntawayll portion orepertureain, 'the foward. terldref :the elementgi and lerer n 219i recreated @bereken-r Arie, Bil-f is eerried bythefffee.-end efithe.lever?? end-hee.; a flat-sided "member 3| freely,niquntedthereonr" Means Aie provided, uitrollen tlfleed; @fasering 32, to hold the lever 2' Fin either onel-of tv vo'pvosi."

tions,y controhlledbylacating Aiens 33, and 34. One

endet the sprirxgi'eie `earned byu apreeetien Gelee 3.5:supperted bythe plete, 24 the ,etherend beineeenrleetedtaeinem. 'eerrierlbyer integral with thelever 21,A

A; table 40: rests, uren the element 2,2. and. has, one endapertu-red,` at! 1 ,j threceiye areducedend,

of the shaft liandbe iigedtl'rereto-througnzthe aid 'of' aV pin 42; The tablem 40, extends. the` fulll llength of the adjustableV elementu 2&2 andl has, ane1ongate groove or slet 44 in tn ehlew ei-su iffag'ze` thereof/whiciis substantially rectangular in gene,

eralcontcur.4 Thetmernber v3-I is Inovalcly dispsedl inthe-grooveMeandjthroughthis means, inqzliigbl ing-,the associati-ide leven 2-9,A` the slatA .2 and the ik; .harina t integral, callarV lever 21, the table may be moved about the axis of the shaft l in either one of two positions. A dovetail member 46 is mounted upon the table 48 through the aid of screws 41, and upon this member a clamping or supporting unit indicated generally at 48 is movably disposed.

The unit 48 includes a body 49 formed to straddle the table 49 as well as the member 46, as illustrated in Fig. 3, and is provided with a dovetail slot 58 extending the full length thereof for connection with the member 46 and for movement of the unit in a given path longitudinally of the table toward the axis of the shaft I5. The body 49 has a substantially V-shaped groove 5l therein with vertical projections 52 and 53 integral therewith. A retaining member 54 is pivotally supported, at 55, upon the projection I52 and has a lip 56 formed to be engaged by a latch 51, the latter being pivotally supported at 58 upon the vertical projection 53 and normally urged into closed position through the aid of a spring 59. A locating pin 69, carried by the retaining member 54, and a hold-down spring 6|, apertured to receive the pin, to engage the supporting unit shown in Figs. 4 and 5, are also carried by the member 54. As previously stated, the body 49, through its dovetail slot 59 and its overhanging side portions, is slidable longitudinally of the table on the member 46 and, through the aid of screws 64, it may be caused to lock the unit 48 in any desired position relative to the table 48.

Attention is now directed to Figs. 1, 4 and 5, -where a material or work supporting unit 65 is adapted to removably receive a mounting plate 66 for an article 61, which in the present instance is a quartz crystal bar. The crystal is xed to the mounting plate by suitable means, such as cement, and it is through the aid of the unit 65 that the crystal is mounted in a cutting apparatus for cutting the crystal into wafers or plates of desired thicknesses. A standard supporting means for the unit is provided in the cutting apparatus (not shown) but it is important that the atomic plane of the crystal lie in a given position with respect to the cutting element of such an apparatus. Therefore, it is important that the atomic plane of the crystal be previously located with respect to the center line of the unit 65. In some instances it is preferred that the atomic plane of the crystal be parallel with the physical plane or face of the crystal. In other instances it is desired that the atomic plane lie at a given angle, for example, two degrees (2), with respect to the physical plane or face of the crystal, For this reason the adjusting means through the actuation of the lever 21 is provided, to locate the table 48 with the supporting unit 48 in either one of two positions.

These'positions are with respect an X-ray unit 68 positioned to cause projection of an X-ray beam, lindicated at 69, in the direction of the arrows (Fig. 6). Associated with the apparatus is also a unit sensitive to an X-ray beam, commercially known as an ionization chamber, 10. The X-ray beam is reected by the atomic plane in the crystal structure and not by the physical plane or surface of the crystal.

During the previous processing steps to cut the crystal into the various parts to produce the crystal bar 61 these steps have been aided by various means to produce, as in Fig. 7, a crystal bar with the atomic plane parallel with the physical plane or surface of the bar, or the bar illustrated in Fig.

8 with the atomic plane positioned at an angle 75 of two degree (2) with respect to the face or surface of the crystal bar. It is necessary, however, regardless of the painstaking eiforts to maintain quartz crystal bars with the atomic planes in the desired positions, to continue testing lthe product after each step of the process to assure the desired final result, as but small variaf tions may produce unsatisfactory crystal plates.

This apparatus prepares the quartz crystal bar for the iinal cutting operation, the operation wherein the bar is cut into thin wafers or plates. With this in mind, it is necessary to provide means to vary the position of the atomic plane in either instance, with that of Fig. 1, or that of Fig. 8, so that if lthere should be any variation from that desired, this may be corrected prior to the iinal sawing of the crystal bar. This variable means is present in the unit 65. The unit includes a head 12 of the contour similar to the mounting plate 66, with a straight slot 13 adapted to receive a mounting bolt 14 of the mounting plate, and an arcuate slot 15 to receive a similar mounting bolt 16. With this formation the bolts 14 and 16 may be loosened sufficiently without the complete removal of the nut portions thereof, the bolt 14 inserted in the slot 13, and through the arcuate movement of the mounting plate with the crystal bar thereon, the bolt 16 may be moved into the slot 15, and by tightening the nut portions of the bolts, the mounting plate may be secured in place.

Through a universal connection 11, the head 12 is supported by a shank or supporting rod 18 in a main body 19 of the unit 65. The head 12 lies adjacent a flexible member and has a recess 8| adapted to receive a xed pin 82 carried by the body 19 and the member 88. Adjusting pins 83, disposed at spaced positions with respect to each other and the fixed pin 82, are disposed in engagement with the inner surface of the head 12, and through the cooperation of adjustable screws 84, threadedly disposed in the body 19, the pins 83 may be individually adjusted to bring about any desired variation in the location of the crystal bar 61, particularly the atomic plane thereof with respect to the center line of the unit 65. It will be noted, by viewing Fig. 3, that the body 19 is provided with longitudinal slots 86 in its periphery, these slots being disposed ninety degrees apart and adapted to singly receive the locating pin 60.

Referring again to the supporting rod 18, it will be noted that Ithe inner or left end thereof (Fig. 4) is threaded as at 88 and has disposed a retaining member 89 threadedly disposed thereon, the latter having a reduced portion receivable ln a central aperture 90 of the body 19 and, through central apertures in a retaining ring 9| and through an annular flexible member 92. The ring 9| and the member 92 are apertured, the former including apertures 93 to provide access to the ends of the adjustable screws 84, the apertures in the flexible member 92 being to receive the ends of the adjusting screws.

After the crystal bar is mounted upon the mounting plate and the latter secured to the supporting unit 65, this is located in the clamping unit 48. This entire structure may be moved relative to the table 40 to locate a point in the crystal bar 61 in alignment with the axis of the shaft l 5. The locating means includes a point 95 of a stop screw 96, the latter being supported in a threaded aperture of a bracket 91 which is mounted upon the table 40.

It has been described that through the actuameanraf. tionl off-the lever- 211, :the table with.' thefunitsl 43E and't'thereonimaybe moved relative -to the units 68 andl'lfoflFi'g; 6^'into one or the other of twov positions. crystals are perfect,l that is; if lthe atomic planes thereof are atthe desired locations within-the crystal structure, a deflctionpf the Xf-raybeam' from the crystal into the unitor ionization cha-rn-v ber 'I0 will, give the maximum reading ineach instance., itv isf-desirable, however, to determine the degree of variation from the locations desired if such should exist; Thisl is' brought about through a variable unit indicated generally at S5 irrFigs. 1and'2." Inthisstructure" or unit 95', a rectangular element or block 96" is movably'disposed in an elongate aperture 91 of the element 22 `and isireely mounted on a pin 98 of an eccentric element 99. The element 919 is supported, at' Ilm; `in an aperture in the arm for, rotation aboutan axis eccentric with respect to the pint-S8. Through theaid'of'a lever Ill fixed to the-,eccentric and adapted to move itrotatably between given limits controlledbyv stop pins IIl2and 163, the element 22 together with the table 4) and the entire mechanism supported thereby, may be moved from one of its selected positions, controlled by the lever 2l, a given distance upon both sides of those positions. In lthe present instance this movement is seven and one-half (7l/2) minutes from the neutral or given position to determine accurately the variation. from a predetermined standard the location of the atomic planes in either crystal structure from that desire-d. A spring |64, having one end fixed to a pin I5 carried by the supporting arm 2li, the other end fixed to a lug |06 integral with the lever IIlI, normally holds the latter in its neutral position.

In reviewing the operation ofthe apparatus, let it be understood that if the crystal bar 61 is of the species shown in Fig. 7, the lever 21 will be in the position clockwise from that shown in Figs. 2 and 6, `whereas if the crystal bar is of the species shown in Fig. 8, the lever 2l will have been moved into the positions shown in Figs. 2 and 6. The crystal bar selected is secured to the mounting plate 56 and the latter is xed to the head I2 of the unit 65. The supporting unit 65 is then mounted in the clamping unit 48 and, through the aid of the elongate slots 86, repeated examination' may be made of the crystal bar to determine the accurate location of the atomic plane. If necessary, adjustments may be made in the unit 65 to vary the relative position of the crystal bar with respect to the X-ray beam until the desired location of the crystal is made with respect to the center line of the unit 65. During each of these positions of the supporting unit 65 and the clamping unit 48, the crystal is held in the position determined by the locating point 95 of the screw 96. Thus at all times the point of deflection of the X-ray beam is at the axis of the shaft I5, and all adjustments, -whether in one position or the other, through the aid of the lever 2'1 or the finer adjustment relative to each position made through the aid of the lever IIlI, are made about the axis of the shaft I5 and about the point of deflection of the X-ray beam. The illustrations in Figs. 7 and 8 are exaggerated for the reason that the atomic plane is closely adjacent the physical plane or surface of the crystal bar.

When one bar has been tested and the necessary adjustments made in the unit 65, this bar with its unit may be removed and another supporting unit 65, with another crystal bar and its Thesepositions are' fixed,v` anddftlfie"v mointihgfpl-atefdisposed thereon; Viirsertif-:d:iirt'lief mad'epossible'through the resilient spring S'Iand-f the locating pin- 66. Also, through the aidfofthe'A slots'A 8I5A the crystal maybe tested inthe four diiferentpositionsto accurately determineE the location' of the atomio plane.' This :mounting-1 off the:` uniti 'fir`1` place-may be accomplished iwhenthaunitf 4W is disposed away from f the locating screWSBi The two units are thenfmoved toward the locatingi screw until" the crystal engages l thefscrew;- at which time the desired-point of the crystal isflocated'in the axis offthe shaft: At this time, depending upon the' type offcrystalbarrto betested, whether that illustrated in Fig. 7 or that in'Fig; 8,` tlie`r table with the two units48-andv (i5-is adjusted accordingly through the operationof "'the lever-'21lan`d its associatedvstructure; This' adjustment, as-previously stated, is'about'theaxis ofther shaft I5.' If, by chance, they operator-1 should not have-the proper location ofthe-'table and units with respect to the X-ray beam, this extreme variation would be registered in the unit 'I0 and the lever 21 adjusted to correct this positioning of the mechanism. At this time the lever IIJI is actuated in b oth directions from the normal position, and during the actuation of the lever IDI any variation of the atomic plane of the crystal from that desired m-ay be corrected through the aid of the adjustable screws 84 in the unit 65. This may result in the positioning of the physical plane or outer surface of the crystal bar at an angle with respect to the center line of the unit 65. However, by mounting the unit 65 with the crystal bar in a fixture located at a given position with respect to a grinding mechanism or element, the variation existing in the crystal bar may be corrected so that when it is finally mounted in the cutting apparatus, the location of theV atomic plane with respect to the physical plane will be accurate.

Although specic improvements of the invention have been shown and described, it will be understood that they are but illustrative and that various modifications may be made therein without departing from the scope and spirit of this invention as dened by the appended claims.

What is claimed is:

1. An apparatus for analysis of quartz crystals comprising an X-ray beam projecting unit, a unit sensitive to an X-ray beam, a table mounted for movement about an axis intersecting an X-ray beam from the projecting unit, a support for a quartz crystal to be analyzed, a clamping unit for removably holding the support, a carriage, upon which the clamp is xedly mounted, movable radially of the axis on the table between an analyzing position, where an atomic plane of the crystal will reflect the X-ray beam at the said axis, and a loading position with the crystal spaced from the X-ray beam, a xed position arm parallel with the table, an element interposed between the table and the arm and movable about the said axis, a lever pivotally supported by the element, means movable by the lever to cause movement of the table about the said axis to locate the atomic plane of the crystal in a selected one of a plurality of given positions, means to limit movement of the lever to locate the table with the atomic plane in the given positions, and means carried by the arm, normally holding the element against movement, actuable to move the element given distances in opposing directions to vary the angular relation of the atomic planewith respect to the X-ray beam to cause maximum reflection of the beaminto the said sensitive unit.

2. An apparatus for analysis of quartz crystals comprising an X-ray beam projecting unit, a unit sensitive to an X-ray beam, ya table mounted for movement about an axis intersecting an X-ray beam from the projecting unit, a support for a quartz crystal to be analyzed, a clamping unit for removably holding the support, a carriage, upon which the clamp is xediy mounted, movable radially of the axis on the table between an analyzing position, Where an atomic plane of the crystal will reect the X-ray beam at the said axis, a loading position with the crystal spaced from the X-ray beam, a xed position arm parallel with the table, an element interposed between the table and the arm and movable about the said axis, a lever pivotally supported by the element, means movable by the lever to cause movement of the table about the said axis to locate the atomic plane of the crystal in a selected one of a plurality of given positions, means to limit movement of the lever' to locate the table with the atomic plane in the given positions, and an eccentric member carried by the arm and connected to the element to normally hold the element against movement, and a lever movable limited distances in opposing directions from a normal position to vary the angular relation of the atomic plane with respect to the X-ray beam to cause maximum reflection of the beam into the said sensitive unit.

JOHN C. LULEY.

REFERENCES CITED The following references are of record in the le of this patent:

UNITED STATES PATENTS Number Name Date 2,392,528 Fankuchen Jan. 8, 1946 2,377,862 Bond June 12, 1945 2,380,235 Harker July 10, 1945 2,383,764 Bond Aug. 28, 1945 2,151,736 Broughton Mar. 28, 1939 

